公司由清华大学IC装备团队在清华大学及其下属“北京-清华工业技术研究院”和02专项的支持下创立，是一家肩负着专项重大科研成果产业化重任的高新技术企业。主要从事半导体制造装备及其关键零部件研发、设计、生产、销售与技术服务。主营业务及核心产品主要是步进扫描光刻机双工件台，该产品是智力密集、知识密集、技术密集的尖端IC制造装备核心子系统。
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