我公司采用白色光线干涉仪,具备纳米水平的辨析率(Resolution)的同时,还具有比AFM或Stylus等可以高速测量更广 的领域的优点。而且,因为是利用光学的非接触式测量,在测量时完全没有试片的损伤也是一个优点,它可以适用于整 个显示屏、半导体产业的研究开发,以及品质管理方面的精密测量.
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