上海荏原精密机械有限公司隶属于株式会社日本荏原制作所下设精密电子事业群,是一家以半导体制造设备为主的提供营销、维修以及售后服务的外商独资企业。
公司成立于1999年4月,注册资本4.95亿日元,位于上海浦东新区,业务范围主要涵盖真空泵、化学机械研磨机、电镀机、尾气处理装置等产品的销售、售后服务、技术支持等。
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