ACM Shanghai

ACM Research (Shanghai), Inc. (hereinafter referred to as 'ACM Shanghai') was established in 2005. As a key integrated circuit equipment enterprise introduced under the Shanghai Municipal Government's 'Science and Education Revitalize the City' project, it is a semiconductor equipment manufacturer with world-advanced technology.

ACM Shanghai integrates R&D, design, manufacturing, and sales, providing high-end semiconductor equipment to global customers. Main products include single-wafer and batch wet cleaning equipment, electroplating equipment, stress-free polishing equipment, vertical furnace equipment, track coating/developing equipment, and PECVD equipment.

Adhering to a development strategy of differentiated competition and innovation, ACM Shanghai leverages its proprietary technologies such as single-wafer megasonic cleaning, single-wafer batch combined cleaning, electroplating, stress-free polishing, and vertical furnace processes to provide customized equipment and process solutions to global wafer fabrication, advanced packaging, and other customers, effectively enhancing production efficiency, improving product yield, and reducing production costs.

The company holds high-tech enterprise qualifications and has been rated among the 'Top Five Chinese Semiconductor Equipment Enterprises' for many consecutive years. It has undertaken major research tasks in multiple National Science and Technology Major Projects. Rooted in independent innovation, through years of technological R&D and process accumulation, ACM Shanghai successfully developed the world's first SAPS/TEBO megasonic cleaning technology and Tahoe single-wafer batch combined cleaning technology, applied to wafer cleaning at technology nodes of 28nm and below. SAPS and TEBO solved the two major challenges of applying megasonic cleaning technology to single-wafer cleaning equipment; compared with existing single-wafer cleaning equipment, the Tahoe single-wafer batch combined cleaning equipment significantly reduces sulfuric acid usage, helping customers lower production costs while meeting energy-saving and emission-reduction requirements.

Leveraging its advanced technology and rich product portfolio, ACM Shanghai has developed into one of the few semiconductor specialized equipment providers in mainland China with certain international competitiveness. Its products have been recognized by numerous mainstream semiconductor manufacturers both domestically and internationally, earning a good market reputation.